CVD・MOCVD customized equipment
Various plasma sources can be equipped! Customized design for CVD, MOCVD, and ALD equipment.
We handle "CVD and MOCVD customized equipment" designed for research and development as well as small-scale batch production. CVD, MOCVD, and ALD equipment can be customized, and a variety of plasma sources from the PLUM, FLARION, and MIRENIQUE series can be installed. Additionally, it is equipped with the FLOCON series flow management system. 【Features】 ■ Equipment for research and development or small-scale batch production ■ Customized design for CVD, MOCVD, and ALD equipment ■ Variety of plasma sources from the PLUM, FLARION, and MIRENIQUE series can be installed ■ Equipped with the FLOCON series flow management system *For more details, please refer to the PDF document or feel free to contact us.
- Company：ハイテック・システムズ
- Price：Other
